Silicon Tube

Silicon Carbide Tubes
In the LPCVD equipment, the sic tube is one of the cores of the entire equipment, with an inner tube and an outer tube. LPCVD equipment is a kind of CVD equipment, which generates solid reactants through chemical reaction of mixed gases under low pressure and high temperature conditions and deposits them on the surface of silicon wafers to form thin films.

Features of DSTC Silicon Tube
1
CZ for mono-crystalline silicon material, high purity, mature processing and cleaning process

Specifications of DSTC Silicon Tube
Product Length 100mm-2000mm
Product Diameter 80mm-1000mm
Product Structure Welded, Integrated
Conductive Type/Doping Custom
Resistivity Low Resistance (E.G.<0.015, <0.02...).
Moderate Resistance (E.G. 1-4);
High Resistance (E.G. 60-90);
Customer Customization
Material Type Polycrystal/Single Crystal
Crystal Orientation Customized

Silicon Tube Gallery
It applied to the high-temperature furnace, wafer high-temperature process, deposition process area.

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